Helium Ion Microscope (HIM)
Description of Capabilities
- 10 - 35 keV Helium gas field ion source
- Nanopatterning Software (FIBICS)
- Everhart Thornley secondary electron detector
- Electron flood gun for charge compensation
- 5 axis motorized stage
- transmission camera (Medipix 256 x 256 pixels 55 microns, avalanche photodiode array)
- (Funded by CFI/BCKDF, 2016)
