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Integrated Circuit Technology ENSC 851 (3)
Review of semiconductor physics. Technology of semiconductor devices and integrated circuits: material evaluation, crystal growth, doping, epitaxy, thermal diffusion, ion implantation, lithography and device patterning, and thin film formation. Design and fabrication of active and passive semiconductor devices, packaging techniques and reliability of integrated circuits.
| Section | Instructor | Day/Time | Location |
|---|---|---|---|
|
Jan 4 – Apr 11, 2023: Mon, 4:30–6:20 p.m.
|
Burnaby |
||
| LA01 |
Jan 4 – Apr 11, 2023: Wed, 4:30–8:20 p.m.
|
Burnaby |
|
| LA02 |
Jan 4 – Apr 11, 2023: Fri, 8:30 a.m.–12:20 p.m.
|
Burnaby |