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Introduction to Microelectronic Fabrication ENSC 495 (4)
Lectures provide the theory of integrated circuit fabrication. Students fabricate diodes, transistors and test structures in the laboratory. Topics: clean room practice, thermal oxidation and diffusion, photolithography, thin film deposition, etching, ion implantation, packaging, CMOS and bipolar processes. Prerequisite: ENSC 225 or ENSC 226 or MSE 251 or PHYS 365, with a minimum grade of C- and permission of the instructor and a minimum of 80 units. Enrollment in this course is by application only.
| Section | Instructor | Day/Time | Location |
|---|---|---|---|
|
Jan 4 – Apr 11, 2023: Mon, 4:30–6:20 p.m.
|
Burnaby |
||
| LB01 |
Jan 4 – Apr 11, 2023: Wed, 4:30–8:20 p.m.
|
Burnaby |
|
| LB02 |
Jan 4 – Apr 11, 2023: Fri, 8:30 a.m.–12:20 p.m.
|
Burnaby |