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Microdevice Engineering and Characterization MSE 811 (3)
Analytical methods used in design of microdevices. Exact and approximate methods for analysis of static, dynamic, and thermal behaviour of microdevices. Techniques for electro-mechanical conversions and development of reduced order models. Principles for computer simulation of microdevices. Common material and device characterization techniques, including atomic force microscopy, thin film stress/thickness measurement, and scanning electron microscopy. Recommended: MSE 311, MSE 711 or equivalent.