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Integrated Circuit Technology ENSC 851 (3)

Review of semiconductor physics. Technology of semiconductor devices and integrated circuits: material evaluation, crystal growth, doping, epitaxy, thermal diffusion, ion implantation, lithography and device patterning, and thin film formation. Design and fabrication of active and passive semiconductor devices, packaging techniques and reliability of integrated circuits.

Section Instructor Day/Time Location
Glenn Chapman
Jan 5 – Apr 11, 2016: Tue, 5:30–7:20 p.m.
Burnaby
LA01 Glenn Chapman
Jan 5 – Apr 11, 2016: Wed, 5:30–9:20 p.m.
Burnaby