Introduction to Microelectronic Fabrication ENSC 495 (4)
Lectures provide the theory of integrated circuit fabrication. Students fabricate diodes, transistors and test structures in the laboratory. Topics: clean room practice, thermal oxidation and diffusion, photolithography, thin film deposition, etching, ion implantation, packaging, CMOS and bipolar processes. Prerequisite: Completion of 80 units including ENSC 225 or 226, and permission of the instructor.
| Section | Instructor | Day/Time | Location |
|---|---|---|---|
|
Glenn Chapman |
Jan 6 – Apr 13, 2015: Tue, 5:30–7:20 p.m.
|
Burnaby |
|
| LA01 |
Jan 6 – Apr 13, 2015: Wed, 5:30–9:20 p.m.
|
Burnaby |
|
| LA02 |
Jan 6 – Apr 13, 2015: Thu, 2:30–6:20 p.m.
|
Burnaby |