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Introduction to Microelectromechanical Systems MSE 311 (3)
An introduction to microelectromechanical systems, covering thin film processing technologies, bulk and surface micromachining, and MEMS applications. Prerequisite: MSE 222 (or ENSC 282), MSE 251 (or ENSC 226). Students with credit for ENSC 331 may not take MSE 311 for further credit.