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Introduction to Microelectronic Fabrication ENSC 495 (4)
Lectures provide the theory of integrated circuit fabrication. Students fabricate diodes, transistors and test structures in the laboratory. Topics: clean room practice, thermal oxidation and diffusion, photolithography, thin film deposition, etching, ion implantation, packaging, CMOS and bipolar processes. Prerequisite: Completion of 80 units including ENSC 225 or 226, and permission of the instructor.
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